硅太陽能電池
綜述:
太(tai)陽能(neng)電(dian)(dian)(dian)池(chi)又稱為(wei)“太(tai)陽能(neng)芯片(pian)”或“光(guang)(guang)電(dian)(dian)(dian)池(chi)”,是一種利用太(tai)陽光(guang)(guang)直(zhi)接(jie)發電(dian)(dian)(dian)的光(guang)(guang)電(dian)(dian)(dian)半導體(ti)薄片(pian)。它(ta)只要被滿足一定照(zhao)度條(tiao)件的光(guang)(guang)照(zhao)到(dao),瞬間就可輸出電(dian)(dian)(dian)壓及(ji)在有(you)回路的情況下產生電(dian)(dian)(dian)流。在物(wu)理學上稱為(wei)太(tai)陽能(neng)光(guang)(guang)伏。太(tai)陽能(neng)芯片(pian)的表面微觀形貌、原料和(he)工(gong)藝對電(dian)(dian)(dian)池(chi)電(dian)(dian)(dian)性(xing)能(neng)影響很大(da),需要掃描電(dian)(dian)(dian)鏡進行觀測,從而控制電(dian)(dian)(dian)池(chi)質量。
儀器介(jie)紹:
EM科特掃描電(dian)鏡,根(gen)據樣品倉大小(xiao)或拓展分(fen)析附件能力,分(fen)為 CUBE系(xi)列掃描電(dian)鏡、GENESIS系(xi)列掃描電(dian)鏡、VERITAS系(xi)列掃描電(dian)鏡。
試(shi)驗方法(fa):
取不(bu)同工藝進程的電(dian)池芯片直接放(fang)入掃描電(dian)鏡中觀察。快速觀察模(mo)式,照相時間 10s
結(jie)論:
EM科特(te)掃(sao)(sao)描電(dian)(dian)鏡(jing)(jing),可滿足硅太陽(yang)能電(dian)(dian)池制造工藝控制檢測需要。采用CUBE臺式(shi)掃(sao)(sao)描電(dian)(dian)鏡(jing)(jing)或GENESIS系列(lie)掃(sao)(sao)描電(dian)(dian)鏡(jing)(jing),需要切割芯(xin)片。使(shi)用VERITAS 系列(lie)掃(sao)(sao)描電(dian)(dian)鏡(jing)(jing)可觀(guan)察整(zheng)塊芯(xin)片,無損(sun)檢測。
1、晶(jing)圓制絨(rong)結(jie)構掃描電鏡圖像(xiang)
2、晶圓表面Saw damage etching
3、鋁漿電極掃(sao)描電鏡圖像
4、銀漿電極(ji)掃描電鏡圖像
20000x
50000x
100000x 納米銀粉顆粒(li)